KN

Kenji Nishi

NI Nikon: 3 patents #7 of 120Top 6%
Overall (1989): #9,102 of 140,708Top 7%
3
Patents 1989

Issued Patents 1989

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
4880310 Optical device for alignment in a projection exposure apparatus — 1989-11-14
4856905 Projection exposure apparatus — 1989-08-15
4829193 Projection optical apparatus with focusing and alignment of reticle and wafer marks — 1989-05-09