Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4884101 | Apparatus capable of adjusting the light amount | — | 1989-11-28 |
| 4870452 | Projection exposure apparatus | Issei Tanaka, Akira Miyaji | 1989-09-26 |
| 4860374 | Apparatus for detecting position of reference pattern | Seiro Murakami, Susumu Makinouchi, Hidemi Kawai, Masaichi Murakami | 1989-08-22 |
| 4853745 | Exposure apparatus | Saburo Kamiya, Kazuaki Suzuki | 1989-08-01 |
| 4820899 | Laser beam working system | Ikuo Hikima, Akira Miyaji, Saburo Kamiya | 1989-04-11 |
| 4801977 | Projection optical apparatus | Shoji Ishizaka, Hideo Mizutani, Susumu Makinouchi | 1989-01-31 |