Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4829024 | Method of forming layered polysilicon filled contact by doping sensitive endpoint etching | Jeffrey L. Klein, Stephen S. Poon, Sudhir K. Madan | 1989-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4829024 | Method of forming layered polysilicon filled contact by doping sensitive endpoint etching | Jeffrey L. Klein, Stephen S. Poon, Sudhir K. Madan | 1989-05-09 |