Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4877509 | Semiconductor wafer treating apparatus utilizing a plasma | Toshiaki Ogawa, Nobuo Fujiwara, Kenji Kawai, Hiroshi Morita, Kyusaku Nishioka | 1989-10-31 |
TS
Teruo Shibano
Overall (1989): #51,374 of 140,708Top 40%
1
Patents 1989