Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4811690 | Thin film deposition apparatus | Yasuyuki Kawagoe, Kenichiro Yamanishi | 1989-03-14 |
| 4812326 | Evaporation source with a shaped nozzle | Hisashi Tsukazaki, Kenichiro Yamanishi | 1989-03-14 |