Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871433 | Method and apparatus for improving the uniformity ion bombardment in a magnetron sputtering system | Israel A. Wagner | 1989-10-03 |
| 4855033 | Cathode and target design for a sputter coating apparatus | — | 1989-08-08 |