Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886444 | Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process | Ikuo Hirase | 1989-12-12 |
| 4872944 | Process for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor therefore | Ikuo Hirase | 1989-10-10 |