Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4805123 | Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems | Donald F. Specht, Tim S. Wihl, James J. Hager, Jr., Matthew B. Lutzker | 1989-02-14 |