Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4860229 | Wafer flatness station | Robert C. Abbe, Noel S. Poduje | 1989-08-22 |
| 4849916 | Improved spatial resolution measurement system and method | Robert C. Abbe, Noel S. Poduje | 1989-07-18 |