Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871646 | Polysilane compound and photosensitive composition | Shizu Hayase, Yasunobu Onishi, Toru Ushirogouchi | 1989-10-03 |
| 4828958 | Photosensitive composition and method of forming a resist pattern with copolymer of polyvinyl phenol | Shuzi Hayase, Yasunobu Onishi | 1989-05-09 |
| 4822716 | Polysilanes, Polysiloxanes and silicone resist materials containing these compounds | Yasunobu Onishi, Shuji Hayase, Akiko Hirao | 1989-04-18 |