Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4884120 | Semiconductor device and method for making the same | Reiji Tamaki, Junichi Arima, Masaaki Ikegami, Eisuke Tanaka, Kenji Saito | 1989-11-28 |
| 4867859 | Apparatus for forming a thin film | Shigeru Harada, Takeshi Noguchi | 1989-09-19 |