Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4837123 | Mask structure for lithography, method of preparation thereof and lithographic method | Masaaki Matsushima, Keiko Matsuda, Hirofumi Shibata | 1989-06-06 |
| 4804600 | Lithographic mask structure and process for preparing the same | Hirofumi Shibatya, Keiko Matsuda | 1989-02-14 |
| 4804929 | Control pulse generator | Hiroshi Iwahashi, Masamichi Asano, Akira Narita, Shinichi Kikuchi | 1989-02-14 |