Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4844945 | Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (PECVD) | Eldurkar V. Bhaskar, Marzio Leban | 1989-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4844945 | Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (PECVD) | Eldurkar V. Bhaskar, Marzio Leban | 1989-07-04 |