Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4875825 | Method for automated cassette handling | John S. Bailey, D. R. Gunawardena, Ulrich Kaempf | 1989-10-24 |
| 4872835 | Hot chuck assembly for integrated circuit wafers | Richard G. Baer | 1989-10-10 |