Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4859857 | Ion-projection apparatus and method of operating same | Hans Loschner, Peter Wolf | 1989-08-22 |
| 4835392 | Ion-projection apparatus | Hans Loschner | 1989-05-30 |
| 4823011 | Ion-projection lithographic apparatus with means for aligning the mask image with the substrate | Hans Loschner | 1989-04-18 |