Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4836886 | Binary chlorofluorocarbon chemistry for plasma etching | — | 1989-06-06 |
| 4836887 | Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas | Faith S. Ichishita | 1989-06-06 |