Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871919 | Electron beam lithography alignment using electric field changes to achieve registration | Fritz J. Hohn, George A. Sai-Halasz | 1989-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871919 | Electron beam lithography alignment using electric field changes to achieve registration | Fritz J. Hohn, George A. Sai-Halasz | 1989-10-03 |