Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4803181 | Process for forming sub-micrometer patterns using silylation of resist side walls | Peter Buchmann, Bart J. Van Zeghbroech | 1989-02-07 |
PV
Peter Vettiger
Overall (1989): #69,142 of 140,708Top 50%
1
Patents 1989