Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4855197 | Mask for ion, electron or X-ray lithography and method of making it | Werner Zapka, Jurgen Kempf, Joachim Keyser | 1989-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4855197 | Mask for ion, electron or X-ray lithography and method of making it | Werner Zapka, Jurgen Kempf, Joachim Keyser | 1989-08-08 |