YM

Yukio Matsuyama

HI Hitachi: 1 patents #814 of 2,935Top 30%
Overall (1989): #39,545 of 140,708Top 30%
1
Patents 1989

Issued Patents 1989

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
4860371 Method and apparatus for detecting pattern defects Toshiaki Ichinose 1989-08-22