Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4840487 | Measuring apparatus for etching pits | Minori Noguchi, Toru Otsubo | 1989-06-20 |
| 4808258 | Plasma processing method and apparatus for carrying out the same | Toru Otsubo, Takashi Kamimura, Minoru Noguchi, Teru Fujii | 1989-02-28 |