Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4814615 | Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure | Yasuo Nakagawa, Asahiro Kuni, Hitoshi Kubota, Hiroya Koshishiba | 1989-03-21 |