Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4861424 | Ashing process of a resist layer formed on a substrate under fabrication to a semiconductor device | Shuzo Fujimura | 1989-08-29 |
| 4861732 | Method for removing an ion-implanted organic resin layer during fabrication of semiconductor devices | Shuzo Fujimura | 1989-08-29 |