Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4888473 | Wafer disk location monitoring system and tagged process carriers for use therewith | Alexander N. Rossi | 1989-12-19 |
| 4827110 | Method and apparatus for monitoring the location of wafer disks | Alexander N. Rossi | 1989-05-02 |