Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4869802 | Apparatus for the production of coatings of uniform thickness profile on substrates, especially by cathode sputtering | Peter Wirz, Heinz-Wilhelm Pfannekuche, Thomas Bathon | 1989-09-26 |