Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871417 | Method and apparatus for surface treating of substrates | Masaru Morita, Masato Tanaka | 1989-10-03 |
| 4811443 | Apparatus for washing opposite surfaces of a substrate | — | 1989-03-14 |