Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4877650 | Method for forming deposited film | Jinsho Matsuyama, Yutaka Hirai, Akira Sakai | 1989-10-31 |
| 4873125 | Method for forming deposited film | Jinsho Matsuyama, Yutaka Hirai, Akira Sakai | 1989-10-10 |
| 4861623 | Method for forming deposited film by generating precursor with halogenic oxidizing agent | Masaaki Hirooka, Junichi Hanna, Isamu Shimizu | 1989-08-29 |
| 4842897 | Method for forming deposited film | Eiji Takeuchi, Jun-Ichi Hanna, Isamu Shimizu, Masaaki Hirooka, Akira Sakai | 1989-06-27 |
| 4812331 | Method for forming deposited film containing group III or V element by generating precursors with halogenic oxidizing agent | Masaaki Hirooka, Jun-Ichi Hanna, Isamu Shimizu | 1989-03-14 |
| 4803947 | Apparatus for forming deposited film | Masaaki Hirooka, Junichi Hanna, Isamu Shimizu | 1989-02-14 |