Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4881100 | Alignment method | Akiya Nakai, Shinji Utamura | 1989-11-14 |
| 4811059 | Alignment method | Shinji Utamura, Akiya Nakai | 1989-03-07 |
| 4801808 | Alignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical system | — | 1989-01-31 |