Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4855023 | Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids used in semiconductor wafer cleaning | R. Scot Clark, Joe G. Hoffman, Alan W. Jones, Allen H. Jones, Jr., David W. Persichini +2 more | 1989-08-08 |
| 4828660 | Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids | R. Scot Clark, Joe G. Hoffman, Alan W. Jones, Allen H. Jones, Jr., David W. Persichini +2 more | 1989-05-09 |