Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871911 | Electron beam apparatus comprising a semiconductor electron emitter | Gerardus G. P. Van Gorkom, Arthur M. E. Hoeberechts, Harm Tolner | 1989-10-03 |
| 4823013 | Charged particles exposure apparatus having an optically deformable beam bounding diaphragm | — | 1989-04-18 |
| 4820921 | Method of beam centering | Johan G. Bakker | 1989-04-11 |