Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4884123 | Contact plug and interconnect employing a barrier lining and a backfilled conductor material | Pankaj Dixit, Richard K. Klein, Craig S. Sander, Mohammad Farnaam | 1989-11-28 |
| 4847674 | High speed interconnect system with refractory non-dogbone contacts and an active electromigration suppression mechanism | Mohammad Farnaam, Pankaj Dixit, Lewis Shen | 1989-07-11 |
| 4820611 | Titanium nitride as an antireflection coating on highly reflective layers for photolithography | William H. Arnold, Mohammad Farnaam | 1989-04-11 |