Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4795880 | Low pressure chemical vapor deposition furnace plasma clean apparatus | James A. Hayes | 1989-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4795880 | Low pressure chemical vapor deposition furnace plasma clean apparatus | James A. Hayes | 1989-01-03 |