Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362384 | Means for providing uniform illumination to a light sensitive element | Orest Engelbrecht | 1982-12-07 |
| 4353087 | Automatic mask alignment | Daniel G. Berry | 1982-10-05 |
| 4344160 | Automatic wafer focusing and flattening system | Fred C. Gabriel | 1982-08-10 |