Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341593 | Plasma etching method for aluminum-based films | Yasuhiro Horiike, Takashi Yamazaki | 1982-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341593 | Plasma etching method for aluminum-based films | Yasuhiro Horiike, Takashi Yamazaki | 1982-07-27 |