Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4356623 | Fabrication of submicron semiconductor devices | — | 1982-11-02 |
| 4354896 | Formation of submicron substrate element | Al F. Tasch, Jr., Thomas C. Holloway | 1982-10-19 |
| 4331708 | Method of fabricating narrow deep grooves in silicon | — | 1982-05-25 |