Issued Patents 1982
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4350428 | Shutter mechanism | — | 1982-09-21 |
| 4345836 | Two-stage wafer prealignment system for an optical alignment and exposure machine | — | 1982-08-24 |
| 4336917 | Shock and vibration isolation system | — | 1982-06-29 |
| 4328941 | Shock and vibration isolation system | Lawrence A. Wise | 1982-05-11 |
| 4311390 | Interferometrically controlled stage with precisely orthogonal axes of motion | — | 1982-01-19 |