Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4360393 | Vapor deposition of H.sub.3 PO.sub.4 and formation of thin phosphorus layer on silicon substrates | — | 1982-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4360393 | Vapor deposition of H.sub.3 PO.sub.4 and formation of thin phosphorus layer on silicon substrates | — | 1982-11-23 |