Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4360414 | Method of producing structures comprised of layers consisting of silicides or silicide-polysilicon by reactive sputter etching | — | 1982-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4360414 | Method of producing structures comprised of layers consisting of silicides or silicide-polysilicon by reactive sputter etching | — | 1982-11-23 |