Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341816 | Method for attaching disc- or plate-shaped targets to cooling plates for sputtering systems | Richard Lauterbach | 1982-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341816 | Method for attaching disc- or plate-shaped targets to cooling plates for sputtering systems | Richard Lauterbach | 1982-07-27 |