Issued Patents 1982
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4357369 | Method of plasma etching a substrate | Kurt B. Kilichowski | 1982-11-02 |
| 4355094 | Positive radiation sensitive resist terpolymers | Kurt B. Kilichowski | 1982-10-19 |
| 4341861 | Aqueous developable poly(olefin sulfone) terpolymers | — | 1982-07-27 |
| 4330671 | Positive resist for electron beam and x-ray lithography and method of using same | — | 1982-05-18 |