Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341592 | Method for removing photoresist layer from substrate by ozone treatment | Thomas C. Penn | 1982-07-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341592 | Method for removing photoresist layer from substrate by ozone treatment | Thomas C. Penn | 1982-07-27 |