HI

Hideaki Itakura

VA Vlsi Technology Research Association: 1 patents #3 of 25Top 15%
Overall (1982): #58,910 of 81,411Top 75%
1
Patents 1982

Issued Patents 1982

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
4348577 High selectivity plasma etching method Hiroyasu Toyoda, Hiroyoshi Komiya 1982-09-07