Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4318796 | Sputtering apparatus | Suehiro Kato, Takeshi Nakamura | 1982-03-09 |
| 4309266 | Magnetron sputtering apparatus | Takeshi Nakamura, Suehiro Kato | 1982-01-05 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4318796 | Sputtering apparatus | Suehiro Kato, Takeshi Nakamura | 1982-03-09 |
| 4309266 | Magnetron sputtering apparatus | Takeshi Nakamura, Suehiro Kato | 1982-01-05 |