Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4331504 | Etching process with vibrationally excited SF.sub.6 | John W. Coburn, Eric Kay | 1982-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4331504 | Etching process with vibrationally excited SF.sub.6 | John W. Coburn, Eric Kay | 1982-05-25 |