Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4340461 | Modified RIE chamber for uniform silicon etching | William W. Hicks, John H. Keller | 1982-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4340461 | Modified RIE chamber for uniform silicon etching | William W. Hicks, John H. Keller | 1982-07-20 |