Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4355937 | Low shock transmissive antechamber seal mechanisms for vacuum chamber type semi-conductor wafer electron beam writing apparatus | Alfred Mack, Fred L. Penzetta | 1982-10-26 |
| 4342090 | Batch chip placement system | George A. Caccoma, Joseph H. Koestner, Frank M. Tappen | 1982-07-27 |