Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4346301 | Ion implantation system | William P. Robinson | 1982-08-24 |
| 4327292 | Alignment process using serial detection of repetitively patterned alignment marks | Victor Wang | 1982-04-27 |
| 4310743 | Ion beam lithography process and apparatus using step-and-repeat exposure | — | 1982-01-12 |