Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4365264 | Semiconductor device with high density low temperature deposited Si.sub.w N.sub.x H.sub.y O.sub.z passivating layer | Kiichiro Mukai, Shin-ichi Muramatsu, Atsushi Hiraiwa, Shigeru Takahashi, Katsuhisa Usami +3 more | 1982-12-21 |