Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4352974 | Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching | Tatsumi Mizutani, Kunio Harada, Hideo Komatsu, Shinya Iida | 1982-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4352974 | Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching | Tatsumi Mizutani, Kunio Harada, Hideo Komatsu, Shinya Iida | 1982-10-05 |