Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362389 | Method and apparatus for projection type mask alignment | Mituyoshi Koizumi, Yoshimasa Oshima | 1982-12-07 |
| 4343553 | Shape testing apparatus | Yasuo Nakagawa, Hiroshi Makihira, Yoshitada Oshida | 1982-08-10 |